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작성자 관리자 작성일15-10-15 10:29 조회6,707회 댓글0건본문
The application technology of UV imprinting
Imprinting is based on the principle of mechanically pressing thin polymer film with a stamp containing the specific pattern, in a thermo-mechanical or UV curing process. The patterned polymer can act as a final device, e.g. prism film for LCD BLU, deco pattern for electronics etc, biomedical array etc.
UV imprint process is in-situ material dispense
and subsequent UV-curing and releasing the stamp.
The stamp with 3D micro or nano scale pattern is pressed into the liquid
resist to define the desired pattern. Material is cured by ultraviolet
light radiation. The stamp is then separated and - if applicable -
moved to next imprint position. The stamp is aligned to the substrate.
The key element for imprint is so called, 1)designed pattern mold with its repeated releasing performance and rigid and flexible property for its solid dimension and freedom to substrate flexible, 2)thermal or UV curable material with its shrinkage control, refractive index and adhesion to substrate.
Low cost production solutions of micro structure is on its active stage and nanostructures are in development that may be the driving forces of Semiconductor, optoelectronics technology tomorrow. In particular, Nanoimprint lithography and its variations have been developed as a cost-effective alternative to high-resolution e-beam lithography.
Keywords:
Imprint, nano scale, UV curing, mold, aspect ratio,
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